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UVTM High Purity ZrO₂ Targets for Optical & Semiconductor Coating
Product Overview and Material Properties
Zirconium Oxide ($ ext{ZrO}_2$) sputtering targets are pivotal functional materials widely utilized in Physical Vapor Deposition (PVD) magnetron sputtering systems. Known for its remarkable refractive index, high dielectric constant, excellent chemical inertness, and thermal endurance, Zirconium Oxide plays an irreplaceable role in modern thin-film technology.
UV Tech Material LTD. (UVTM) supplies premium-grade Zirconium Oxide Targets with a guaranteed purity of $ge 99.7\%$, ensuring minimal particle arcing and high coating yields across demanding industrial environments.
Advanced Thermal Spraying Process
To overcome the inherent brittleness and density challenges of ceramic targets, UVTM utilizes advanced Thermal Spraying forming technology to manufacture both planar and rotatable Zirconium Oxide targets:
High Structural Density: Thermal spraying creates a uniform, compact, and highly adherent coating layer, preventing target cracking during high-power sputtering.
Enhanced Heat Dissipation: Thermal-sprayed rotatable target tubes provide superior cooling capability, enabling stable, long-duration continuous production.
Superior Deposition Rate: Uniform grain structure ensures steady sputtering yields and consistent thin-film stoichiometry.
Key Application Fields
Semiconductor & Quantum Electronics: Serves as high-$k$ gate dielectric layers and buffer layers in superconducting/quantum electronic devices.
Energy Storage & Power Battery Industry: Applied as functional interface coatings to enhance the cycle stability and thermal safety of advanced lithium-ion and solid-state batteries.
Precision Optics & Solar Photovoltaics: Ideal for anti-reflective and high-refractive coatings in optical lenses and high-efficiency solar cells.
Energy-Saving & Smart Glass Industry: Used as durable top-coat protection and optical tuning layers in Low-E architectural glass and electrochromic display panels.
Available Specifications
Planar Targets: Tailored for precision laboratory, R&D, and custom batch PVD equipment.
Rotatable Targets: Engineered for large-scale industrial continuous coating lines with material utilization rates up to 80%.
UV Tech Material LTD. (UVTM) is committed to delivering custom thin-film solution materials with rigorous quality control standards to global high-tech industries.
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